UV LED Wafer Tape Curing System 12-inch

Drawer-loaded UV LED system that irradiates 10- and 12-inch wafer frames from below at 365 nm with 95 % uniformity, reducing UV tape adhesion before die picking.

Irradiance: > 600mW/cm²
Wavelength: 365nm
Wafer size: 10 and 12inch
Drawer capacity (L × W × H): 380 × 380 × 7mm

Prices, lead times and technical advice on request.

Applications

Overview

The AWM1-JJ02 is the larger of the two wafer UV tape curing systems. Its drawer takes wafer frames up to 12 inch, and a UV LED array below the drawer irradiates the tape at 365 nm with 95 % uniformity, so adhesion drops evenly across the wafer and dies release cleanly for picking.

Set exposure time and irradiance on the touch screen and start the cycle; a three-colour status light shows when the system is running, waiting or has a fault. Its total power of 2,000 W is twice that of the 8-inch system, in the same 400 × 400 × 360 mm housing.

Typical applications

UV tape release after dicing, grinding and thinning of silicon wafers, glass, ceramics and other semiconductor components.

Key features

Irradiates from below, so wafer frames simply lie in the drawer
LED array laid out for 95 % irradiance uniformity
Exposure time and irradiance set on the touch screen
Status light shows fault (red), ready (yellow) and running (green)
Accepts several wafer frame sizes up to 12 inch
Suits tape release after dicing, grinding and thinning

Specifications

Specifications
Wafer size	10 and 12 inch
Drawer capacity (L × W × H)	380 × 380 × 7 mm
Wavelength	365 nm
LED source	SVC UV LED
Irradiance	> 600 mW/cm²
Uniformity	95 %
Irradiation direction	Bottom up
Adjustable parameters	Exposure time and irradiance
Operation	Touch screen, English
Cooling	Air

Machine
External dimensions (L × W × H)	400 × 400 × 360 mm
Supply voltage	100 to 240 V AC, 50/60 Hz
Total power	2,000 W
Housing	White sheet steel
Weight	55 kg net, 60 kg in wooden case

Other UV Curing Oven models

View all 5 models

AO180180
UV LED Curing Oven 180 × 180 mm
Compact benchtop UV LED oven with a hinged door, a 180 × 180 mm opening and a 100 × 100 mm irradiator head, for shielded curing of small parts and samples.
Peak irradiance
750 / 1,500 / 2,500 / 3,500 mW/cm²
Internal chamber (L × W × H)
210 × 190 × 180 mm
Emitting area
100 × 100 mm
AO300300
UV LED Curing Oven 300 × 300 mm
Cube-shaped UV LED oven with a hinged door, a 300 × 300 mm opening and a 250 × 250 mm irradiator head, for shielded batch curing of larger parts and trays.
Peak irradiance
750 / 1,500 / 2,500 / 3,500 mW/cm²
Internal chamber (L × W × H)
300 × 300 × 300 mm
Emitting area
250 × 250 mm
AO04
UV LED Drawer Curing Oven 400 × 400 mm
Flat 400 × 400 × 130 mm UV LED oven with a pull-out drawer and a 150 × 150 mm irradiator head; pushing the drawer in starts the exposure.
Peak irradiance
750 / 1,500 / 2,500 / 3,500 mW/cm²
Internal chamber (L × W × H)
300 × 300 × 80 mm
Emitting area
150 × 150 mm