UV LED Wafer Tape Curing System 8-inch

Compact drawer-loaded UV LED system that irradiates 6- and 8-inch wafer frames from below at 365 nm, reducing UV tape adhesion before die picking.

Irradiance: > 600mW/cm²
Wavelength: 365nm
Wafer size: 6 and 8inch
Irradiation area: 260 × 260mm

Prices, lead times and technical advice on request.

Applications

Overview

After wafer dicing or back grinding, the UV tape that holds the dies has to release before picking. The AWM1-JJ01 irradiates the tape from below with a 365 nm UV LED array, which reduces its adhesion so the dies lift off cleanly in the next process step.

Load the wafer frame into the drawer, set exposure time and irradiance on the touch screen and start the cycle. The enclosed design keeps UV light inside the housing, and the LED source runs cool, so heat-sensitive materials are not damaged. For 10- and 12-inch wafers, choose the 12-inch system.

Typical applications

UV tape release after dicing, grinding and thinning of silicon wafers, glass, ceramics and other semiconductor substrates.

Key features

Irradiates from below, so wafer frames simply lie in the drawer
Exposure time and irradiance set on the touch screen
Low-temperature UV LED source protects heat-sensitive materials
Enclosed light source with no UV leakage at the sides
LED source rated for 20,000 hours of continuous operation
No lamp changes, so no routine maintenance of the light source

Specifications

Specifications
Wafer size	6 and 8 inch
Irradiation area	260 × 260 mm
Wavelength	365 nm
LED source	SVC UV LED
Irradiance	> 600 mW/cm²
Irradiation direction	Bottom up
Adjustable parameters	Exposure time and irradiance
Operation	Touch screen, English
LED lifetime	20,000 h
Cooling	Air

Machine
External dimensions (L × W × H)	400 × 400 × 360 mm
Supply voltage	100 to 240 V AC, 50/60 Hz
Total power	1,000 W
Housing	White sheet steel
Weight	40 kg net, 55 kg in wooden case

Other UV Curing Oven models

View all 5 models

AO180180
UV LED Curing Oven 180 × 180 mm
Compact benchtop UV LED oven with a hinged door, a 180 × 180 mm opening and a 100 × 100 mm irradiator head, for shielded curing of small parts and samples.
Peak irradiance
750 / 1,500 / 2,500 / 3,500 mW/cm²
Internal chamber (L × W × H)
210 × 190 × 180 mm
Emitting area
100 × 100 mm
AO300300
UV LED Curing Oven 300 × 300 mm
Cube-shaped UV LED oven with a hinged door, a 300 × 300 mm opening and a 250 × 250 mm irradiator head, for shielded batch curing of larger parts and trays.
Peak irradiance
750 / 1,500 / 2,500 / 3,500 mW/cm²
Internal chamber (L × W × H)
300 × 300 × 300 mm
Emitting area
250 × 250 mm
AO04
UV LED Drawer Curing Oven 400 × 400 mm
Flat 400 × 400 × 130 mm UV LED oven with a pull-out drawer and a 150 × 150 mm irradiator head; pushing the drawer in starts the exposure.
Peak irradiance
750 / 1,500 / 2,500 / 3,500 mW/cm²
Internal chamber (L × W × H)
300 × 300 × 80 mm
Emitting area
150 × 150 mm